本文針對(duì)大直徑硅片的高速自動(dòng)化生產(chǎn)對(duì)硅片的高效、高精度、高可靠性傳輸要求，確定基于3 自由度的R-θ型硅片傳輸定位機(jī)器人方案，設(shè)計(jì)了大直徑硅片傳輸定位機(jī)器人系統(tǒng)。在設(shè)計(jì)過(guò)程中，通過(guò)采用基于絲杠花鍵軸的升降旋轉(zhuǎn)機(jī)構(gòu)、采用周轉(zhuǎn)輪系傳遞臂體的伸縮動(dòng)力等措施，解決了現(xiàn)有同類(lèi)傳輸機(jī)器人系統(tǒng)中存在的剛性低、結(jié)構(gòu)復(fù)雜等問(wèn)題。此外，本文通過(guò)運(yùn)動(dòng)學(xué)分析證明了徑向伸縮部件的直線運(yùn)動(dòng)軌跡；利用拉格朗日的分析力學(xué)的方法對(duì)該部件的模型進(jìn)行了動(dòng)力學(xué)分析，得出動(dòng)力矩方程。調(diào)試結(jié)果表明，該機(jī)器人的徑向伸縮運(yùn)動(dòng)的直線精度達(dá)到了使用要求。
關(guān)鍵詞: 硅片傳輸機(jī)器人；機(jī)構(gòu)；運(yùn)動(dòng)學(xué)分析；動(dòng)力學(xué)分析

Abstract: To satisfy the high efficiency, high precision and high reliability requirement
of transfering and positioning the large-diameter silicon slices in high speed wafer
manufacturing , the R-θtype wafer robot based on 3 DOF is adopted, and the wafer robot is
designed. In the design, the rolling ball screw & the ball spline pair are used as actuating
mechanism in the up-down rotary component. The epicyclic gear train is adopted to drive
the arm to move along line. The new design improves the rigidity of structure of the system
and simplify the mechanism. Furthermore,the kinematic of the linear mechanism of radial
stretch component is analyzed to prove its moving track which moves along line. The model
of the componet is analyzed with Largrange method to achieve the equation of drive torque.
The testing shows that the line accuracy of radial linear stretch component satisfy the
parctical requirement.
Keywords:Wafer robot；Mechanism；Kinematics analysis；Dynamic analysis