采用了溶膠-凝膠工藝在普通的玻璃載玻片上成功地制備出具有c軸擇優取向性、高的可見光透光率、平整均勻的氧化鋅薄膜。通過XRD、AFM以及UV光譜儀等分析，其結果表明：所制備的氧化鋅薄膜具有纖鋅礦型結構，表面均勻致密，薄膜晶粒尺寸大約在40～90nm，溶膠濃度增大時，其晶粒大小呈增大的趨勢。隨著涂膜層數的增加，薄膜的(002)方向的取向度增加。薄膜在可見光區的光透過率>85%，在近紫外光波段透射率急劇減小，對應的禁帶寬度為3.34 eV。
關 鍵 詞 溶膠-凝膠法; ZnO薄膜; c軸擇優取向性; 禁帶寬度

Abstract The ZnO thin films were prepared on glass sheets by sol-gel technology, which were characterized by X-ray diffraction, atomic force microscopy and ultra-violet spectrum. The results indicate that the thin films were c-orientation, highly visible transmittance, homogeneous surface and dense with the crystalline structure of hexagonal wurtizite, the crystalline dimension of 40～90nm. The crystal size increases with the increasing sol concentration, and the films are highly oriented in (002) direction as the growing of the film layers. The transmittance has a sharp fundamental absorption edge in UV region, the optical band gap is evaluate to be around 3.37 eV.
Key words sol-gel; ZnO thin films; c-axis orientation; band gap