自從Clark 和Lyons 在1962 年研制出第一個生物傳感器以來,探測各種生物和化學分子的生化傳感器相 繼問世. 這類傳感器的基本原理是通過生化敏感層,被分析分子在敏感層上的物理或化學吸附被換能器轉化為電 信號. 在眾多的設計中,將活潑的生化敏感材料涂鍍在硅器件表面是一個最有新意的設想. 以往的硅生化傳感器多 設計為膜片式,器件的靈敏度受到限制. 硅微機械懸臂梁是一種靈敏度極高的器件,近年來在傳感器領域受到關 注. 文章總結了目前世界上硅基微懸臂梁生化傳感器的最新發展動態. 對幾種硅懸臂梁的設計方法和工作原理進 行了討論,并給出了幾種新型微生化氣體和液體傳感器檢測不同有機分子和生物分子的結果.
關鍵詞　　懸臂梁,敏感層,靈敏度,噪聲
Abstract 　　Since the development of the glucose sensor by Clark and Lyons in 1962 , generally recognized as the first biosensor , many types of sensors have been developed in which the physical or chemical transducer is provided with a layer containing a biological sensing element . The resulting device is called a biosensor , aimed to produce an electronic signal as a function of the concentration of chemical or biochemical constituent . Among many proposed con2 cepts , the integration of biologically active materials with a silicon chip is one of the most intriguing approaches. The silicon chips are usually designed as membranes , which have limited sensitivity. The microcantilever is an extremely sensitive device , which has attracted much attention during recent years. In this paper , the newest development of cantilever2based biosensors are summarized. The design and principle of microcantilevers together with examples of a few newly developed bio2sensors are discussed.
Key words 　　cantilever , sensitive layer , sensitivity , noise