含有多傳感器的微機電系統在組裝傳感器時, 一般存在著軸對準問題, 軸的非對準誤差能導致很大的系統測量誤差。為此提出一種基于光對準的誤差補償方法, 可以在不需要高精度軸對準的前提下, 對裝配后的組件進行后續誤差檢測和實時補償, 有效地消除裝配誤差對測量精度的影響。將該方法實施于微機電方位水平儀, 用以測量姿態, 通過仿真結果證實了方法的有效性。關鍵詞: 微機電系統; 多傳感器; 軸裝配誤差; 光對準; 誤
差補償
Abstract: A xis2m isalignment p roblem s occur when mult ip le senso rs are assembled into a m icro2elect ro2mechanical system. The axes m isalignment inevitably induces large measurement erro rs. The p roblem is so lved using an erro r compensation method based on
op t ical alignment. The method does no t require imp roved assembly accuracy, but uses erro r po st2surveying and on2line compensation to elim inate assembly erro rs. Result s of simulations conducted w ith a m icro2elect ro2mechanical azimuth2level detecto r p rove the validity of the method.
Key words: m icro2electro2mechanical system; multi2senso r; axis2m isalignment erro r; op tical alignment; erro r compensation